By Martin Bögner, Theodor Doll (auth.), Theodor Doll (eds.)
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Extra info for Advanced Gas Sensing: The Electroadsorptive Effect and Related Techniques
28 Chapter 1 Control Electrodes Potentia l [V] Contact Figure 11. Two Dimensional Simulation of a 100 nm Thin Sn02 Sensor with Three Buried Insulated Control Electrodes Proving a Small Reach Through of the Electrode Control Towards the Surface (front). If a layer thickness below LD can be obtained, the bottleneck effects at the inner sub grain boundaries will become inactive, as we have almost flat band edges over the entire layer depth. The other case of a layer thickness exceeding LD clearly leads to a sensor that is only partially under control of the electrical field.
The mass spectra can be acquired with a maximum repetition rate of 16 kHz, recorded by a digital storage oscilloscope with a 16 bit resolution. Usually a repetition rate of 1-2 kHz was used during the measurement. The gas pulses are produced by a solenoid gas valve. This valve does not bounce, is bake able up to 200°C and is resistant against aggressive gases. It generates gas pulses with rise and fall times of less than 2 ms. In the experiment pulses with a length of 10 ms are chosen. The gas inlet is differentially pumped with a turbo molecular pump.
Beyond the local depth of Lo this method does neither care of band bending and surface state occupancy at inner grain boundaries nor of those at the bottom contact as the Fermi level is uniform due to zero static current within the layer and the bulk is well established. FET arrangements according to Fig. Id are therefore well suited for unproblematic sensing the Electroadsorptive Effect on metal oxide films within micro gas sensors: There is no must for a uniform band bending into the depth of the layer.
Advanced Gas Sensing: The Electroadsorptive Effect and Related Techniques by Martin Bögner, Theodor Doll (auth.), Theodor Doll (eds.)